11/9/2011	9:00:41 AM	Main Vac valve closed
11/9/2011	9:10:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	9:10:06 AM	Recipe started at 9:10 AM
11/9/2011	9:10:06 AM	Helium valve closed
11/9/2011	9:10:06 AM	H2 valve closed
11/9/2011	9:10:06 AM	BCl3 valve closed
11/9/2011	9:10:06 AM	PH3 valve closed
11/9/2011	9:10:06 AM	SiCl4 pre valve closed
11/9/2011	9:10:06 AM	SiCl4 post valve closed
11/9/2011	9:10:06 AM	Main Vac valve closed
11/9/2011	9:10:06 AM	Bubbler valve closed
11/9/2011	9:10:06 AM	Bypass valve opened
11/9/2011	9:10:06 AM	Helium MFC set to  0.000000
11/9/2011	9:10:06 AM	H2 MFC set to  0.000000
11/9/2011	9:10:06 AM	BCl3 MFC set to  0.000000
11/9/2011	9:10:06 AM	PHl3 MFC set to  0.000000
11/9/2011	9:10:06 AM	SiCl4 MFC set to  0.000000
11/9/2011	9:10:06 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	9:10:06 AM	Tube furnace set to 0
11/9/2011	9:12:01 AM	Helium valve closed
11/9/2011	9:12:01 AM	H2 valve closed
11/9/2011	9:12:01 AM	BCl3 valve closed
11/9/2011	9:12:01 AM	PH3 valve closed
11/9/2011	9:12:01 AM	SiCl4 pre valve closed
11/9/2011	9:12:01 AM	SiCl4 post valve closed
11/9/2011	9:12:01 AM	Main Vac valve closed
11/9/2011	9:12:01 AM	Bubbler valve closed
11/9/2011	9:12:01 AM	Bypass valve opened
11/9/2011	9:12:01 AM	Helium MFC set to  0.000000
11/9/2011	9:12:01 AM	H2 MFC set to  0.000000
11/9/2011	9:12:01 AM	BCl3 MFC set to  0.000000
11/9/2011	9:12:01 AM	PHl3 MFC set to  0.000000
11/9/2011	9:12:01 AM	SiCl4 MFC set to  0.000000
11/9/2011	9:12:01 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	9:12:01 AM	Tube furnace set to 0
11/9/2011	9:12:14 AM	Helium valve closed
11/9/2011	9:12:14 AM	H2 valve closed
11/9/2011	9:12:14 AM	BCl3 valve closed
11/9/2011	9:12:14 AM	PH3 valve closed
11/9/2011	9:12:14 AM	SiCl4 pre valve closed
11/9/2011	9:12:14 AM	SiCl4 post valve closed
11/9/2011	9:12:14 AM	Bypass valve closed
11/9/2011	9:12:14 AM	Bubbler valve closed
11/9/2011	9:12:14 AM	Main Vac valve opened
11/9/2011	9:12:14 AM	Helium MFC set to  0.000000
11/9/2011	9:12:14 AM	H2 MFC set to  0.000000
11/9/2011	9:12:14 AM	BCl3 MFC set to  0.000000
11/9/2011	9:12:14 AM	PHl3 MFC set to  0.000000
11/9/2011	9:12:14 AM	SiCl4 MFC set to  0.000000
11/9/2011	9:12:14 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	9:12:14 AM	Tube furnace set to 0
11/9/2011	9:12:15 AM	Run finished at 9:12 AM
11/9/2011	9:12:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	9:16:25 AM	Main Vac valve closed
11/9/2011	9:17:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	9:17:50 AM	Recipe started at 9:17 AM
11/9/2011	9:17:50 AM	Helium valve closed
11/9/2011	9:17:50 AM	H2 valve closed
11/9/2011	9:17:50 AM	BCl3 valve closed
11/9/2011	9:17:50 AM	PH3 valve closed
11/9/2011	9:17:50 AM	SiCl4 pre valve closed
11/9/2011	9:17:50 AM	SiCl4 post valve closed
11/9/2011	9:17:50 AM	Main Vac valve closed
11/9/2011	9:17:50 AM	Bubbler valve closed
11/9/2011	9:17:50 AM	Bypass valve opened
11/9/2011	9:17:50 AM	Helium MFC set to  0.000000
11/9/2011	9:17:50 AM	H2 MFC set to  0.000000
11/9/2011	9:17:50 AM	BCl3 MFC set to  0.000000
11/9/2011	9:17:50 AM	PHl3 MFC set to  0.000000
11/9/2011	9:17:50 AM	SiCl4 MFC set to  0.000000
11/9/2011	9:17:50 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	9:17:50 AM	Tube furnace set to 0
11/9/2011	9:19:49 AM	Helium valve closed
11/9/2011	9:19:49 AM	H2 valve closed
11/9/2011	9:19:49 AM	BCl3 valve closed
11/9/2011	9:19:49 AM	PH3 valve closed
11/9/2011	9:19:49 AM	SiCl4 pre valve closed
11/9/2011	9:19:49 AM	SiCl4 post valve closed
11/9/2011	9:19:49 AM	Main Vac valve closed
11/9/2011	9:19:49 AM	Bubbler valve closed
11/9/2011	9:19:49 AM	Bypass valve opened
11/9/2011	9:19:49 AM	Helium MFC set to  0.000000
11/9/2011	9:19:49 AM	H2 MFC set to  0.000000
11/9/2011	9:19:49 AM	BCl3 MFC set to  0.000000
11/9/2011	9:19:49 AM	PHl3 MFC set to  0.000000
11/9/2011	9:19:49 AM	SiCl4 MFC set to  0.000000
11/9/2011	9:19:49 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	9:19:49 AM	Tube furnace set to 0
11/9/2011	9:20:49 AM	Helium valve closed
11/9/2011	9:20:49 AM	H2 valve closed
11/9/2011	9:20:49 AM	BCl3 valve closed
11/9/2011	9:20:49 AM	PH3 valve closed
11/9/2011	9:20:49 AM	SiCl4 pre valve closed
11/9/2011	9:20:49 AM	SiCl4 post valve closed
11/9/2011	9:20:49 AM	Bypass valve closed
11/9/2011	9:20:49 AM	Bubbler valve closed
11/9/2011	9:20:49 AM	Main Vac valve opened
11/9/2011	9:20:49 AM	Helium MFC set to  0.000000
11/9/2011	9:20:49 AM	H2 MFC set to  0.000000
11/9/2011	9:20:49 AM	BCl3 MFC set to  0.000000
11/9/2011	9:20:49 AM	PHl3 MFC set to  0.000000
11/9/2011	9:20:49 AM	SiCl4 MFC set to  0.000000
11/9/2011	9:20:49 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	9:20:49 AM	Tube furnace set to 0
11/9/2011	9:20:50 AM	Run finished at 9:20 AM
11/9/2011	9:20:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	10:03:53 AM	Helium MFC set to  500.000000
11/9/2011	10:03:54 AM	Main Vac valve closed
11/9/2011	10:03:55 AM	Helium valve opened
11/9/2011	10:04:43 AM	Helium valve closed
11/9/2011	10:04:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	10:04:45 AM	Recipe started at 10:04 AM
11/9/2011	10:04:45 AM	Helium valve closed
11/9/2011	10:04:45 AM	H2 valve closed
11/9/2011	10:04:45 AM	BCl3 valve closed
11/9/2011	10:04:45 AM	PH3 valve closed
11/9/2011	10:04:45 AM	SiCl4 pre valve closed
11/9/2011	10:04:45 AM	SiCl4 post valve closed
11/9/2011	10:04:45 AM	Main Vac valve closed
11/9/2011	10:04:45 AM	Bubbler valve closed
11/9/2011	10:04:45 AM	Bypass valve opened
11/9/2011	10:04:45 AM	Helium MFC set to  0.000000
11/9/2011	10:04:45 AM	H2 MFC set to  0.000000
11/9/2011	10:04:45 AM	BCl3 MFC set to  0.000000
11/9/2011	10:04:45 AM	PHl3 MFC set to  0.000000
11/9/2011	10:04:45 AM	SiCl4 MFC set to  0.000000
11/9/2011	10:04:45 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	10:04:45 AM	Tube furnace set to 0
11/9/2011	10:05:44 AM	Helium valve closed
11/9/2011	10:05:44 AM	H2 valve closed
11/9/2011	10:05:44 AM	BCl3 valve closed
11/9/2011	10:05:44 AM	PH3 valve closed
11/9/2011	10:05:44 AM	SiCl4 pre valve closed
11/9/2011	10:05:44 AM	SiCl4 post valve closed
11/9/2011	10:05:44 AM	Main Vac valve closed
11/9/2011	10:05:44 AM	Bubbler valve closed
11/9/2011	10:05:44 AM	Bypass valve opened
11/9/2011	10:05:44 AM	Helium MFC set to  0.000000
11/9/2011	10:05:44 AM	H2 MFC set to  0.000000
11/9/2011	10:05:44 AM	BCl3 MFC set to  0.000000
11/9/2011	10:05:44 AM	PHl3 MFC set to  0.000000
11/9/2011	10:05:44 AM	SiCl4 MFC set to  0.000000
11/9/2011	10:05:44 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	10:05:44 AM	Tube furnace set to 0
11/9/2011	10:06:44 AM	Helium valve closed
11/9/2011	10:06:44 AM	H2 valve closed
11/9/2011	10:06:44 AM	BCl3 valve closed
11/9/2011	10:06:44 AM	PH3 valve closed
11/9/2011	10:06:44 AM	SiCl4 pre valve closed
11/9/2011	10:06:44 AM	SiCl4 post valve closed
11/9/2011	10:06:44 AM	Bypass valve closed
11/9/2011	10:06:44 AM	Bubbler valve closed
11/9/2011	10:06:44 AM	Main Vac valve opened
11/9/2011	10:06:44 AM	Helium MFC set to  0.000000
11/9/2011	10:06:44 AM	H2 MFC set to  0.000000
11/9/2011	10:06:44 AM	BCl3 MFC set to  0.000000
11/9/2011	10:06:44 AM	PHl3 MFC set to  0.000000
11/9/2011	10:06:44 AM	SiCl4 MFC set to  0.000000
11/9/2011	10:06:44 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	10:06:44 AM	Tube furnace set to 0
11/9/2011	10:06:45 AM	Run finished at 10:06 AM
11/9/2011	10:06:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	11:15:57 AM	Main Vac valve closed
11/9/2011	11:17:05 AM	Main Vac valve opened
11/9/2011	11:17:36 AM	Tube furnace set to 1000
11/9/2011	11:17:54 AM	Recipe started at 11:17 AM
11/9/2011	11:17:54 AM	Helium valve closed
11/9/2011	11:17:54 AM	H2 valve closed
11/9/2011	11:17:54 AM	BCl3 valve closed
11/9/2011	11:17:54 AM	PH3 valve closed
11/9/2011	11:17:54 AM	SiCl4 pre valve closed
11/9/2011	11:17:54 AM	SiCl4 post valve closed
11/9/2011	11:17:54 AM	Main Vac valve closed
11/9/2011	11:17:54 AM	Bypass valve closed
11/9/2011	11:17:54 AM	Bubbler valve closed
11/9/2011	11:17:54 AM	Helium MFC set to  0.000000
11/9/2011	11:17:54 AM	H2 MFC set to  0.000000
11/9/2011	11:17:54 AM	BCl3 MFC set to  0.000000
11/9/2011	11:17:54 AM	PHl3 MFC set to  0.000000
11/9/2011	11:17:54 AM	SiCl4 MFC set to  0.000000
11/9/2011	11:17:54 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	11:17:54 AM	Tube furnace set to 0
11/9/2011	11:17:57 AM	Helium valve closed
11/9/2011	11:17:57 AM	BCl3 valve closed
11/9/2011	11:17:57 AM	PH3 valve closed
11/9/2011	11:17:57 AM	SiCl4 pre valve closed
11/9/2011	11:17:57 AM	SiCl4 post valve closed
11/9/2011	11:17:57 AM	Main Vac valve closed
11/9/2011	11:17:57 AM	Bypass valve closed
11/9/2011	11:17:57 AM	Bubbler valve closed
11/9/2011	11:17:57 AM	H2 valve opened
11/9/2011	11:17:57 AM	Helium MFC set to  0.000000
11/9/2011	11:17:57 AM	H2 MFC set to  500.000000
11/9/2011	11:17:57 AM	BCl3 MFC set to  0.000000
11/9/2011	11:17:57 AM	PHl3 MFC set to  0.000000
11/9/2011	11:17:57 AM	SiCl4 MFC set to  0.000000
11/9/2011	11:17:57 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	11:17:57 AM	Tube furnace set to 100
11/9/2011	11:19:04 AM	Helium valve closed
11/9/2011	11:19:04 AM	BCl3 valve closed
11/9/2011	11:19:04 AM	PH3 valve closed
11/9/2011	11:19:04 AM	SiCl4 pre valve closed
11/9/2011	11:19:04 AM	SiCl4 post valve closed
11/9/2011	11:19:04 AM	Main Vac valve closed
11/9/2011	11:19:04 AM	Bypass valve closed
11/9/2011	11:19:04 AM	H2 valve opened
11/9/2011	11:19:04 AM	Bubbler valve opened
11/9/2011	11:19:04 AM	Helium MFC set to  0.000000
11/9/2011	11:19:04 AM	H2 MFC set to  500.000000
11/9/2011	11:19:04 AM	BCl3 MFC set to  0.000000
11/9/2011	11:19:04 AM	PHl3 MFC set to  0.000000
11/9/2011	11:19:04 AM	SiCl4 MFC set to  0.000000
11/9/2011	11:19:04 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	11:19:04 AM	Tube furnace set to 1000
11/9/2011	11:19:05 AM	Helium valve closed
11/9/2011	11:19:05 AM	BCl3 valve closed
11/9/2011	11:19:05 AM	PH3 valve closed
11/9/2011	11:19:05 AM	SiCl4 pre valve closed
11/9/2011	11:19:05 AM	SiCl4 post valve closed
11/9/2011	11:19:05 AM	Main Vac valve closed
11/9/2011	11:19:05 AM	Bypass valve closed
11/9/2011	11:19:05 AM	H2 valve opened
11/9/2011	11:19:05 AM	Bubbler valve opened
11/9/2011	11:19:05 AM	Helium MFC set to  0.000000
11/9/2011	11:19:05 AM	H2 MFC set to  500.000000
11/9/2011	11:19:05 AM	BCl3 MFC set to  0.000000
11/9/2011	11:19:05 AM	PHl3 MFC set to  0.000000
11/9/2011	11:19:05 AM	SiCl4 MFC set to  0.000000
11/9/2011	11:19:05 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	11:19:05 AM	Tube furnace set to 1000
11/9/2011	11:41:05 AM	Helium valve closed
11/9/2011	11:41:05 AM	BCl3 valve closed
11/9/2011	11:41:05 AM	PH3 valve closed
11/9/2011	11:41:05 AM	Main Vac valve closed
11/9/2011	11:41:05 AM	Bypass valve closed
11/9/2011	11:41:05 AM	H2 valve opened
11/9/2011	11:41:05 AM	SiCl4 pre valve opened
11/9/2011	11:41:05 AM	SiCl4 post valve opened
11/9/2011	11:41:05 AM	Bubbler valve opened
11/9/2011	11:41:05 AM	Helium MFC set to  0.000000
11/9/2011	11:41:05 AM	H2 MFC set to  500.000000
11/9/2011	11:41:05 AM	BCl3 MFC set to  0.000000
11/9/2011	11:41:05 AM	PHl3 MFC set to  0.000000
11/9/2011	11:41:05 AM	SiCl4 MFC set to  30.000000
11/9/2011	11:41:05 AM	Bypass solenoid MFC set to  0.000000
11/9/2011	11:41:05 AM	Tube furnace set to 1000
11/9/2011	12:01:05 PM	Helium valve closed
11/9/2011	12:01:05 PM	BCl3 valve closed
11/9/2011	12:01:05 PM	PH3 valve closed
11/9/2011	12:01:05 PM	SiCl4 pre valve closed
11/9/2011	12:01:05 PM	SiCl4 post valve closed
11/9/2011	12:01:05 PM	Main Vac valve closed
11/9/2011	12:01:05 PM	Bypass valve closed
11/9/2011	12:01:05 PM	H2 valve opened
11/9/2011	12:01:05 PM	Bubbler valve opened
11/9/2011	12:01:05 PM	Helium MFC set to  0.000000
11/9/2011	12:01:05 PM	H2 MFC set to  500.000000
11/9/2011	12:01:05 PM	BCl3 MFC set to  0.000000
11/9/2011	12:01:05 PM	PHl3 MFC set to  0.000000
11/9/2011	12:01:05 PM	SiCl4 MFC set to  0.000000
11/9/2011	12:01:05 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	12:01:06 PM	Tube furnace set to 950
11/9/2011	12:06:06 PM	Helium valve closed
11/9/2011	12:06:06 PM	BCl3 valve closed
11/9/2011	12:06:06 PM	PH3 valve closed
11/9/2011	12:06:06 PM	SiCl4 pre valve closed
11/9/2011	12:06:06 PM	SiCl4 post valve closed
11/9/2011	12:06:06 PM	Main Vac valve closed
11/9/2011	12:06:06 PM	Bypass valve closed
11/9/2011	12:06:06 PM	H2 valve opened
11/9/2011	12:06:06 PM	Bubbler valve opened
11/9/2011	12:06:06 PM	Helium MFC set to  0.000000
11/9/2011	12:06:06 PM	H2 MFC set to  500.000000
11/9/2011	12:06:06 PM	BCl3 MFC set to  0.000000
11/9/2011	12:06:06 PM	PHl3 MFC set to  0.000000
11/9/2011	12:06:06 PM	SiCl4 MFC set to  0.000000
11/9/2011	12:06:06 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	12:06:06 PM	Tube furnace set to 750
11/9/2011	12:11:06 PM	Helium valve closed
11/9/2011	12:11:06 PM	BCl3 valve closed
11/9/2011	12:11:06 PM	PH3 valve closed
11/9/2011	12:11:06 PM	SiCl4 pre valve closed
11/9/2011	12:11:06 PM	SiCl4 post valve closed
11/9/2011	12:11:06 PM	Main Vac valve closed
11/9/2011	12:11:06 PM	Bypass valve closed
11/9/2011	12:11:06 PM	H2 valve opened
11/9/2011	12:11:06 PM	Bubbler valve opened
11/9/2011	12:11:06 PM	Helium MFC set to  0.000000
11/9/2011	12:11:06 PM	H2 MFC set to  500.000000
11/9/2011	12:11:06 PM	BCl3 MFC set to  0.000000
11/9/2011	12:11:06 PM	PHl3 MFC set to  0.000000
11/9/2011	12:11:06 PM	SiCl4 MFC set to  0.000000
11/9/2011	12:11:06 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	12:11:06 PM	Tube furnace set to 750
11/9/2011	12:16:06 PM	H2 valve closed
11/9/2011	12:16:06 PM	BCl3 valve closed
11/9/2011	12:16:06 PM	PH3 valve closed
11/9/2011	12:16:06 PM	SiCl4 pre valve closed
11/9/2011	12:16:06 PM	SiCl4 post valve closed
11/9/2011	12:16:06 PM	Main Vac valve closed
11/9/2011	12:16:06 PM	Bypass valve closed
11/9/2011	12:16:06 PM	Helium valve opened
11/9/2011	12:16:06 PM	Bubbler valve opened
11/9/2011	12:16:06 PM	Helium MFC set to  400.000000
11/9/2011	12:16:06 PM	H2 MFC set to  0.000000
11/9/2011	12:16:06 PM	BCl3 MFC set to  0.000000
11/9/2011	12:16:06 PM	PHl3 MFC set to  0.000000
11/9/2011	12:16:06 PM	SiCl4 MFC set to  0.000000
11/9/2011	12:16:06 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	12:16:06 PM	Tube furnace set to 0
11/9/2011	12:46:06 PM	Helium valve closed
11/9/2011	12:46:06 PM	H2 valve closed
11/9/2011	12:46:06 PM	BCl3 valve closed
11/9/2011	12:46:06 PM	PH3 valve closed
11/9/2011	12:46:06 PM	SiCl4 pre valve closed
11/9/2011	12:46:06 PM	SiCl4 post valve closed
11/9/2011	12:46:06 PM	Main Vac valve closed
11/9/2011	12:46:06 PM	Bypass valve closed
11/9/2011	12:46:06 PM	Bubbler valve closed
11/9/2011	12:46:06 PM	Helium MFC set to  0.000000
11/9/2011	12:46:06 PM	H2 MFC set to  0.000000
11/9/2011	12:46:06 PM	BCl3 MFC set to  0.000000
11/9/2011	12:46:06 PM	PHl3 MFC set to  0.000000
11/9/2011	12:46:06 PM	SiCl4 MFC set to  0.000000
11/9/2011	12:46:06 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	12:46:06 PM	Tube furnace set to 0
11/9/2011	12:51:06 PM	Helium valve closed
11/9/2011	12:51:06 PM	H2 valve closed
11/9/2011	12:51:06 PM	BCl3 valve closed
11/9/2011	12:51:06 PM	PH3 valve closed
11/9/2011	12:51:06 PM	SiCl4 pre valve closed
11/9/2011	12:51:06 PM	SiCl4 post valve closed
11/9/2011	12:51:06 PM	Main Vac valve closed
11/9/2011	12:51:06 PM	Bubbler valve closed
11/9/2011	12:51:06 PM	Bypass valve opened
11/9/2011	12:51:06 PM	Helium MFC set to  0.000000
11/9/2011	12:51:06 PM	H2 MFC set to  0.000000
11/9/2011	12:51:06 PM	BCl3 MFC set to  0.000000
11/9/2011	12:51:06 PM	PHl3 MFC set to  0.000000
11/9/2011	12:51:06 PM	SiCl4 MFC set to  0.000000
11/9/2011	12:51:06 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	12:51:06 PM	Tube furnace set to 0
11/9/2011	12:52:02 PM	Helium valve closed
11/9/2011	12:52:02 PM	H2 valve closed
11/9/2011	12:52:02 PM	BCl3 valve closed
11/9/2011	12:52:02 PM	PH3 valve closed
11/9/2011	12:52:02 PM	SiCl4 pre valve closed
11/9/2011	12:52:02 PM	SiCl4 post valve closed
11/9/2011	12:52:02 PM	Main Vac valve closed
11/9/2011	12:52:02 PM	Bubbler valve closed
11/9/2011	12:52:02 PM	Bypass valve opened
11/9/2011	12:52:02 PM	Helium MFC set to  0.000000
11/9/2011	12:52:02 PM	H2 MFC set to  0.000000
11/9/2011	12:52:02 PM	BCl3 MFC set to  0.000000
11/9/2011	12:52:02 PM	PHl3 MFC set to  0.000000
11/9/2011	12:52:02 PM	SiCl4 MFC set to  0.000000
11/9/2011	12:52:02 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	12:52:02 PM	Tube furnace set to 0
11/9/2011	12:55:02 PM	Helium valve closed
11/9/2011	12:55:02 PM	H2 valve closed
11/9/2011	12:55:02 PM	BCl3 valve closed
11/9/2011	12:55:02 PM	PH3 valve closed
11/9/2011	12:55:02 PM	SiCl4 pre valve closed
11/9/2011	12:55:02 PM	SiCl4 post valve closed
11/9/2011	12:55:02 PM	Bypass valve closed
11/9/2011	12:55:02 PM	Bubbler valve closed
11/9/2011	12:55:02 PM	Main Vac valve opened
11/9/2011	12:55:02 PM	Helium MFC set to  0.000000
11/9/2011	12:55:02 PM	H2 MFC set to  0.000000
11/9/2011	12:55:02 PM	BCl3 MFC set to  0.000000
11/9/2011	12:55:02 PM	PHl3 MFC set to  0.000000
11/9/2011	12:55:02 PM	SiCl4 MFC set to  0.000000
11/9/2011	12:55:02 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	12:55:02 PM	Tube furnace set to 0
11/9/2011	12:55:03 PM	Run finished at 12:55 PM
11/9/2011	1:21:22 PM	Main Vac valve closed
11/9/2011	1:28:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	1:28:03 PM	Recipe started at 1:28 PM
11/9/2011	1:28:03 PM	Helium valve closed
11/9/2011	1:28:03 PM	H2 valve closed
11/9/2011	1:28:03 PM	BCl3 valve closed
11/9/2011	1:28:03 PM	PH3 valve closed
11/9/2011	1:28:03 PM	SiCl4 pre valve closed
11/9/2011	1:28:03 PM	SiCl4 post valve closed
11/9/2011	1:28:03 PM	Main Vac valve closed
11/9/2011	1:28:03 PM	Bubbler valve closed
11/9/2011	1:28:03 PM	Bypass valve opened
11/9/2011	1:28:03 PM	Helium MFC set to  0.000000
11/9/2011	1:28:03 PM	H2 MFC set to  0.000000
11/9/2011	1:28:03 PM	BCl3 MFC set to  0.000000
11/9/2011	1:28:03 PM	PHl3 MFC set to  0.000000
11/9/2011	1:28:03 PM	SiCl4 MFC set to  0.000000
11/9/2011	1:28:03 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	1:28:04 PM	Tube furnace set to 0
11/9/2011	1:30:01 PM	Helium valve closed
11/9/2011	1:30:01 PM	H2 valve closed
11/9/2011	1:30:01 PM	BCl3 valve closed
11/9/2011	1:30:01 PM	PH3 valve closed
11/9/2011	1:30:01 PM	SiCl4 pre valve closed
11/9/2011	1:30:01 PM	SiCl4 post valve closed
11/9/2011	1:30:01 PM	Main Vac valve closed
11/9/2011	1:30:01 PM	Bubbler valve closed
11/9/2011	1:30:01 PM	Bypass valve opened
11/9/2011	1:30:01 PM	Helium MFC set to  0.000000
11/9/2011	1:30:01 PM	H2 MFC set to  0.000000
11/9/2011	1:30:01 PM	BCl3 MFC set to  0.000000
11/9/2011	1:30:01 PM	PHl3 MFC set to  0.000000
11/9/2011	1:30:01 PM	SiCl4 MFC set to  0.000000
11/9/2011	1:30:01 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	1:30:02 PM	Tube furnace set to 0
11/9/2011	1:31:02 PM	Helium valve closed
11/9/2011	1:31:02 PM	H2 valve closed
11/9/2011	1:31:02 PM	BCl3 valve closed
11/9/2011	1:31:02 PM	PH3 valve closed
11/9/2011	1:31:02 PM	SiCl4 pre valve closed
11/9/2011	1:31:02 PM	SiCl4 post valve closed
11/9/2011	1:31:02 PM	Bypass valve closed
11/9/2011	1:31:02 PM	Bubbler valve closed
11/9/2011	1:31:02 PM	Main Vac valve opened
11/9/2011	1:31:02 PM	Helium MFC set to  0.000000
11/9/2011	1:31:02 PM	H2 MFC set to  0.000000
11/9/2011	1:31:02 PM	BCl3 MFC set to  0.000000
11/9/2011	1:31:02 PM	PHl3 MFC set to  0.000000
11/9/2011	1:31:02 PM	SiCl4 MFC set to  0.000000
11/9/2011	1:31:02 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	1:31:02 PM	Tube furnace set to 0
11/9/2011	1:31:03 PM	Run finished at 1:31 PM
11/9/2011	1:31:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	3:18:21 PM	Recipe started at 3:18 PM
11/9/2011	3:18:21 PM	Helium valve closed
11/9/2011	3:18:21 PM	H2 valve closed
11/9/2011	3:18:21 PM	BCl3 valve closed
11/9/2011	3:18:21 PM	PH3 valve closed
11/9/2011	3:18:21 PM	SiCl4 pre valve closed
11/9/2011	3:18:21 PM	SiCl4 post valve closed
11/9/2011	3:18:21 PM	Main Vac valve closed
11/9/2011	3:18:21 PM	Bypass valve closed
11/9/2011	3:18:21 PM	Bubbler valve closed
11/9/2011	3:18:21 PM	Helium MFC set to  0.000000
11/9/2011	3:18:21 PM	H2 MFC set to  0.000000
11/9/2011	3:18:21 PM	BCl3 MFC set to  0.000000
11/9/2011	3:18:21 PM	PHl3 MFC set to  0.000000
11/9/2011	3:18:21 PM	SiCl4 MFC set to  0.000000
11/9/2011	3:18:21 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	3:18:21 PM	Tube furnace set to 0
11/9/2011	3:18:24 PM	Helium valve closed
11/9/2011	3:18:24 PM	BCl3 valve closed
11/9/2011	3:18:24 PM	PH3 valve closed
11/9/2011	3:18:24 PM	SiCl4 pre valve closed
11/9/2011	3:18:24 PM	SiCl4 post valve closed
11/9/2011	3:18:24 PM	Main Vac valve closed
11/9/2011	3:18:24 PM	Bypass valve closed
11/9/2011	3:18:24 PM	Bubbler valve closed
11/9/2011	3:18:24 PM	H2 valve opened
11/9/2011	3:18:24 PM	Helium MFC set to  0.000000
11/9/2011	3:18:24 PM	H2 MFC set to  500.000000
11/9/2011	3:18:24 PM	BCl3 MFC set to  0.000000
11/9/2011	3:18:24 PM	PHl3 MFC set to  0.000000
11/9/2011	3:18:24 PM	SiCl4 MFC set to  0.000000
11/9/2011	3:18:24 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	3:18:24 PM	Tube furnace set to 100
11/9/2011	3:19:33 PM	Helium valve closed
11/9/2011	3:19:33 PM	BCl3 valve closed
11/9/2011	3:19:33 PM	PH3 valve closed
11/9/2011	3:19:33 PM	SiCl4 pre valve closed
11/9/2011	3:19:33 PM	SiCl4 post valve closed
11/9/2011	3:19:33 PM	Main Vac valve closed
11/9/2011	3:19:33 PM	Bypass valve closed
11/9/2011	3:19:33 PM	H2 valve opened
11/9/2011	3:19:33 PM	Bubbler valve opened
11/9/2011	3:19:33 PM	Helium MFC set to  0.000000
11/9/2011	3:19:33 PM	H2 MFC set to  500.000000
11/9/2011	3:19:33 PM	BCl3 MFC set to  0.000000
11/9/2011	3:19:33 PM	PHl3 MFC set to  0.000000
11/9/2011	3:19:33 PM	SiCl4 MFC set to  0.000000
11/9/2011	3:19:33 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	3:19:33 PM	Tube furnace set to 1000
11/9/2011	3:19:34 PM	Helium valve closed
11/9/2011	3:19:34 PM	BCl3 valve closed
11/9/2011	3:19:34 PM	PH3 valve closed
11/9/2011	3:19:34 PM	SiCl4 pre valve closed
11/9/2011	3:19:34 PM	SiCl4 post valve closed
11/9/2011	3:19:34 PM	Main Vac valve closed
11/9/2011	3:19:34 PM	Bypass valve closed
11/9/2011	3:19:34 PM	H2 valve opened
11/9/2011	3:19:34 PM	Bubbler valve opened
11/9/2011	3:19:34 PM	Helium MFC set to  0.000000
11/9/2011	3:19:34 PM	H2 MFC set to  500.000000
11/9/2011	3:19:34 PM	BCl3 MFC set to  0.000000
11/9/2011	3:19:34 PM	PHl3 MFC set to  0.000000
11/9/2011	3:19:34 PM	SiCl4 MFC set to  0.000000
11/9/2011	3:19:34 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	3:19:35 PM	Tube furnace set to 1000
11/9/2011	3:41:35 PM	Helium valve closed
11/9/2011	3:41:35 PM	BCl3 valve closed
11/9/2011	3:41:35 PM	PH3 valve closed
11/9/2011	3:41:35 PM	Main Vac valve closed
11/9/2011	3:41:35 PM	Bypass valve closed
11/9/2011	3:41:35 PM	H2 valve opened
11/9/2011	3:41:35 PM	SiCl4 pre valve opened
11/9/2011	3:41:35 PM	SiCl4 post valve opened
11/9/2011	3:41:35 PM	Bubbler valve opened
11/9/2011	3:41:35 PM	Helium MFC set to  0.000000
11/9/2011	3:41:35 PM	H2 MFC set to  500.000000
11/9/2011	3:41:35 PM	BCl3 MFC set to  0.000000
11/9/2011	3:41:35 PM	PHl3 MFC set to  0.000000
11/9/2011	3:41:35 PM	SiCl4 MFC set to  34.000000
11/9/2011	3:41:35 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	3:41:35 PM	Tube furnace set to 1000
11/9/2011	4:01:35 PM	Helium valve closed
11/9/2011	4:01:35 PM	BCl3 valve closed
11/9/2011	4:01:35 PM	PH3 valve closed
11/9/2011	4:01:35 PM	SiCl4 pre valve closed
11/9/2011	4:01:35 PM	SiCl4 post valve closed
11/9/2011	4:01:35 PM	Main Vac valve closed
11/9/2011	4:01:35 PM	Bypass valve closed
11/9/2011	4:01:35 PM	H2 valve opened
11/9/2011	4:01:35 PM	Bubbler valve opened
11/9/2011	4:01:35 PM	Helium MFC set to  0.000000
11/9/2011	4:01:35 PM	H2 MFC set to  500.000000
11/9/2011	4:01:35 PM	BCl3 MFC set to  0.000000
11/9/2011	4:01:35 PM	PHl3 MFC set to  0.000000
11/9/2011	4:01:35 PM	SiCl4 MFC set to  0.000000
11/9/2011	4:01:35 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	4:01:35 PM	Tube furnace set to 950
11/9/2011	4:06:35 PM	Helium valve closed
11/9/2011	4:06:35 PM	BCl3 valve closed
11/9/2011	4:06:35 PM	PH3 valve closed
11/9/2011	4:06:35 PM	SiCl4 pre valve closed
11/9/2011	4:06:35 PM	SiCl4 post valve closed
11/9/2011	4:06:35 PM	Main Vac valve closed
11/9/2011	4:06:35 PM	Bypass valve closed
11/9/2011	4:06:35 PM	H2 valve opened
11/9/2011	4:06:35 PM	Bubbler valve opened
11/9/2011	4:06:35 PM	Helium MFC set to  0.000000
11/9/2011	4:06:35 PM	H2 MFC set to  500.000000
11/9/2011	4:06:35 PM	BCl3 MFC set to  0.000000
11/9/2011	4:06:35 PM	PHl3 MFC set to  0.000000
11/9/2011	4:06:35 PM	SiCl4 MFC set to  0.000000
11/9/2011	4:06:35 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	4:06:35 PM	Tube furnace set to 750
11/9/2011	4:11:35 PM	Helium valve closed
11/9/2011	4:11:35 PM	BCl3 valve closed
11/9/2011	4:11:35 PM	PH3 valve closed
11/9/2011	4:11:35 PM	SiCl4 pre valve closed
11/9/2011	4:11:35 PM	SiCl4 post valve closed
11/9/2011	4:11:35 PM	Main Vac valve closed
11/9/2011	4:11:35 PM	Bypass valve closed
11/9/2011	4:11:35 PM	H2 valve opened
11/9/2011	4:11:35 PM	Bubbler valve opened
11/9/2011	4:11:35 PM	Helium MFC set to  0.000000
11/9/2011	4:11:35 PM	H2 MFC set to  500.000000
11/9/2011	4:11:35 PM	BCl3 MFC set to  0.000000
11/9/2011	4:11:35 PM	PHl3 MFC set to  0.000000
11/9/2011	4:11:35 PM	SiCl4 MFC set to  0.000000
11/9/2011	4:11:35 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	4:11:35 PM	Tube furnace set to 750
11/9/2011	4:16:35 PM	H2 valve closed
11/9/2011	4:16:35 PM	BCl3 valve closed
11/9/2011	4:16:35 PM	PH3 valve closed
11/9/2011	4:16:35 PM	SiCl4 pre valve closed
11/9/2011	4:16:35 PM	SiCl4 post valve closed
11/9/2011	4:16:35 PM	Main Vac valve closed
11/9/2011	4:16:35 PM	Bypass valve closed
11/9/2011	4:16:35 PM	Helium valve opened
11/9/2011	4:16:35 PM	Bubbler valve opened
11/9/2011	4:16:35 PM	Helium MFC set to  400.000000
11/9/2011	4:16:35 PM	H2 MFC set to  0.000000
11/9/2011	4:16:35 PM	BCl3 MFC set to  0.000000
11/9/2011	4:16:35 PM	PHl3 MFC set to  0.000000
11/9/2011	4:16:35 PM	SiCl4 MFC set to  0.000000
11/9/2011	4:16:35 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	4:16:35 PM	Tube furnace set to 0
11/9/2011	4:46:35 PM	Helium valve closed
11/9/2011	4:46:35 PM	H2 valve closed
11/9/2011	4:46:35 PM	BCl3 valve closed
11/9/2011	4:46:35 PM	PH3 valve closed
11/9/2011	4:46:35 PM	SiCl4 pre valve closed
11/9/2011	4:46:35 PM	SiCl4 post valve closed
11/9/2011	4:46:35 PM	Main Vac valve closed
11/9/2011	4:46:35 PM	Bypass valve closed
11/9/2011	4:46:35 PM	Bubbler valve closed
11/9/2011	4:46:35 PM	Helium MFC set to  0.000000
11/9/2011	4:46:35 PM	H2 MFC set to  0.000000
11/9/2011	4:46:35 PM	BCl3 MFC set to  0.000000
11/9/2011	4:46:35 PM	PHl3 MFC set to  0.000000
11/9/2011	4:46:35 PM	SiCl4 MFC set to  0.000000
11/9/2011	4:46:35 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	4:46:36 PM	Tube furnace set to 0
11/9/2011	4:51:36 PM	Helium valve closed
11/9/2011	4:51:36 PM	H2 valve closed
11/9/2011	4:51:36 PM	BCl3 valve closed
11/9/2011	4:51:36 PM	PH3 valve closed
11/9/2011	4:51:36 PM	SiCl4 pre valve closed
11/9/2011	4:51:36 PM	SiCl4 post valve closed
11/9/2011	4:51:36 PM	Main Vac valve closed
11/9/2011	4:51:36 PM	Bubbler valve closed
11/9/2011	4:51:36 PM	Bypass valve opened
11/9/2011	4:51:36 PM	Helium MFC set to  0.000000
11/9/2011	4:51:36 PM	H2 MFC set to  0.000000
11/9/2011	4:51:36 PM	BCl3 MFC set to  0.000000
11/9/2011	4:51:36 PM	PHl3 MFC set to  0.000000
11/9/2011	4:51:36 PM	SiCl4 MFC set to  0.000000
11/9/2011	4:51:36 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	4:51:36 PM	Tube furnace set to 0
11/9/2011	4:52:27 PM	Helium valve closed
11/9/2011	4:52:27 PM	H2 valve closed
11/9/2011	4:52:27 PM	BCl3 valve closed
11/9/2011	4:52:27 PM	PH3 valve closed
11/9/2011	4:52:27 PM	SiCl4 pre valve closed
11/9/2011	4:52:27 PM	SiCl4 post valve closed
11/9/2011	4:52:27 PM	Main Vac valve closed
11/9/2011	4:52:27 PM	Bubbler valve closed
11/9/2011	4:52:27 PM	Bypass valve opened
11/9/2011	4:52:27 PM	Helium MFC set to  0.000000
11/9/2011	4:52:27 PM	H2 MFC set to  0.000000
11/9/2011	4:52:27 PM	BCl3 MFC set to  0.000000
11/9/2011	4:52:27 PM	PHl3 MFC set to  0.000000
11/9/2011	4:52:27 PM	SiCl4 MFC set to  0.000000
11/9/2011	4:52:27 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	4:52:27 PM	Tube furnace set to 0
11/9/2011	4:55:27 PM	Helium valve closed
11/9/2011	4:55:27 PM	H2 valve closed
11/9/2011	4:55:27 PM	BCl3 valve closed
11/9/2011	4:55:27 PM	PH3 valve closed
11/9/2011	4:55:27 PM	SiCl4 pre valve closed
11/9/2011	4:55:27 PM	SiCl4 post valve closed
11/9/2011	4:55:27 PM	Bypass valve closed
11/9/2011	4:55:27 PM	Bubbler valve closed
11/9/2011	4:55:27 PM	Main Vac valve opened
11/9/2011	4:55:27 PM	Helium MFC set to  0.000000
11/9/2011	4:55:27 PM	H2 MFC set to  0.000000
11/9/2011	4:55:27 PM	BCl3 MFC set to  0.000000
11/9/2011	4:55:27 PM	PHl3 MFC set to  0.000000
11/9/2011	4:55:27 PM	SiCl4 MFC set to  0.000000
11/9/2011	4:55:27 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	4:55:27 PM	Tube furnace set to 0
11/9/2011	4:55:28 PM	Run finished at 4:55 PM
11/9/2011	5:41:28 PM	Main Vac valve closed
11/9/2011	5:48:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	5:49:00 PM	Recipe started at 5:49 PM
11/9/2011	5:49:00 PM	Helium valve closed
11/9/2011	5:49:00 PM	H2 valve closed
11/9/2011	5:49:00 PM	BCl3 valve closed
11/9/2011	5:49:00 PM	PH3 valve closed
11/9/2011	5:49:00 PM	SiCl4 pre valve closed
11/9/2011	5:49:00 PM	SiCl4 post valve closed
11/9/2011	5:49:00 PM	Main Vac valve closed
11/9/2011	5:49:00 PM	Bubbler valve closed
11/9/2011	5:49:00 PM	Bypass valve opened
11/9/2011	5:49:00 PM	Helium MFC set to  0.000000
11/9/2011	5:49:00 PM	H2 MFC set to  0.000000
11/9/2011	5:49:00 PM	BCl3 MFC set to  0.000000
11/9/2011	5:49:00 PM	PHl3 MFC set to  0.000000
11/9/2011	5:49:00 PM	SiCl4 MFC set to  0.000000
11/9/2011	5:49:00 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	5:49:00 PM	Tube furnace set to 0
11/9/2011	5:51:00 PM	Helium valve closed
11/9/2011	5:51:00 PM	H2 valve closed
11/9/2011	5:51:00 PM	BCl3 valve closed
11/9/2011	5:51:00 PM	PH3 valve closed
11/9/2011	5:51:00 PM	SiCl4 pre valve closed
11/9/2011	5:51:00 PM	SiCl4 post valve closed
11/9/2011	5:51:00 PM	Main Vac valve closed
11/9/2011	5:51:00 PM	Bubbler valve closed
11/9/2011	5:51:00 PM	Bypass valve opened
11/9/2011	5:51:00 PM	Helium MFC set to  0.000000
11/9/2011	5:51:00 PM	H2 MFC set to  0.000000
11/9/2011	5:51:00 PM	BCl3 MFC set to  0.000000
11/9/2011	5:51:00 PM	PHl3 MFC set to  0.000000
11/9/2011	5:51:00 PM	SiCl4 MFC set to  0.000000
11/9/2011	5:51:00 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	5:51:00 PM	Tube furnace set to 0
11/9/2011	5:52:00 PM	Helium valve closed
11/9/2011	5:52:00 PM	H2 valve closed
11/9/2011	5:52:00 PM	BCl3 valve closed
11/9/2011	5:52:00 PM	PH3 valve closed
11/9/2011	5:52:00 PM	SiCl4 pre valve closed
11/9/2011	5:52:00 PM	SiCl4 post valve closed
11/9/2011	5:52:00 PM	Bypass valve closed
11/9/2011	5:52:00 PM	Bubbler valve closed
11/9/2011	5:52:00 PM	Main Vac valve opened
11/9/2011	5:52:00 PM	Helium MFC set to  0.000000
11/9/2011	5:52:00 PM	H2 MFC set to  0.000000
11/9/2011	5:52:00 PM	BCl3 MFC set to  0.000000
11/9/2011	5:52:00 PM	PHl3 MFC set to  0.000000
11/9/2011	5:52:00 PM	SiCl4 MFC set to  0.000000
11/9/2011	5:52:00 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	5:52:00 PM	Tube furnace set to 0
11/9/2011	5:52:01 PM	Run finished at 5:52 PM
11/9/2011	5:52:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	7:04:07 PM	Recipe started at 7:04 PM
11/9/2011	7:04:07 PM	Helium valve closed
11/9/2011	7:04:07 PM	H2 valve closed
11/9/2011	7:04:07 PM	BCl3 valve closed
11/9/2011	7:04:07 PM	PH3 valve closed
11/9/2011	7:04:07 PM	SiCl4 pre valve closed
11/9/2011	7:04:07 PM	SiCl4 post valve closed
11/9/2011	7:04:07 PM	Main Vac valve closed
11/9/2011	7:04:07 PM	Bypass valve closed
11/9/2011	7:04:07 PM	Bubbler valve closed
11/9/2011	7:04:07 PM	Helium MFC set to  0.000000
11/9/2011	7:04:07 PM	H2 MFC set to  0.000000
11/9/2011	7:04:07 PM	BCl3 MFC set to  0.000000
11/9/2011	7:04:07 PM	PHl3 MFC set to  0.000000
11/9/2011	7:04:07 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:04:07 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:04:07 PM	Tube furnace set to 0
11/9/2011	7:04:10 PM	Helium valve closed
11/9/2011	7:04:10 PM	BCl3 valve closed
11/9/2011	7:04:10 PM	PH3 valve closed
11/9/2011	7:04:10 PM	SiCl4 pre valve closed
11/9/2011	7:04:10 PM	SiCl4 post valve closed
11/9/2011	7:04:10 PM	Main Vac valve closed
11/9/2011	7:04:10 PM	Bypass valve closed
11/9/2011	7:04:10 PM	Bubbler valve closed
11/9/2011	7:04:10 PM	H2 valve opened
11/9/2011	7:04:10 PM	Helium MFC set to  0.000000
11/9/2011	7:04:10 PM	H2 MFC set to  500.000000
11/9/2011	7:04:10 PM	BCl3 MFC set to  0.000000
11/9/2011	7:04:10 PM	PHl3 MFC set to  0.000000
11/9/2011	7:04:10 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:04:10 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:04:10 PM	Tube furnace set to 100
11/9/2011	7:04:49 PM	Run aborted at 7:04 PM
11/9/2011	7:04:49 PM	Helium valve closed
11/9/2011	7:04:49 PM	H2 valve closed
11/9/2011	7:04:49 PM	BCl3 valve closed
11/9/2011	7:04:49 PM	PH3 valve closed
11/9/2011	7:04:49 PM	SiCl4 pre valve closed
11/9/2011	7:04:49 PM	SiCl4 post valve closed
11/9/2011	7:04:49 PM	Bypass valve closed
11/9/2011	7:04:49 PM	Main Vac valve closed
11/9/2011	7:04:49 PM	Bubbler valve closed
11/9/2011	7:04:49 PM	Helium MFC set to  0.000000
11/9/2011	7:04:49 PM	H2 MFC set to  0.000000
11/9/2011	7:04:49 PM	BCl3 MFC set to  0.000000
11/9/2011	7:04:49 PM	PHl3 MFC set to  0.000000
11/9/2011	7:04:49 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:04:49 PM	Tube furnace set to 0
11/9/2011	7:05:01 PM	Recipe started at 7:04 PM
11/9/2011	7:05:01 PM	Helium valve closed
11/9/2011	7:05:01 PM	H2 valve closed
11/9/2011	7:05:01 PM	BCl3 valve closed
11/9/2011	7:05:01 PM	PH3 valve closed
11/9/2011	7:05:01 PM	SiCl4 pre valve closed
11/9/2011	7:05:01 PM	SiCl4 post valve closed
11/9/2011	7:05:01 PM	Main Vac valve closed
11/9/2011	7:05:01 PM	Bypass valve closed
11/9/2011	7:05:01 PM	Bubbler valve closed
11/9/2011	7:05:01 PM	Helium MFC set to  0.000000
11/9/2011	7:05:01 PM	H2 MFC set to  0.000000
11/9/2011	7:05:01 PM	BCl3 MFC set to  0.000000
11/9/2011	7:05:01 PM	PHl3 MFC set to  0.000000
11/9/2011	7:05:01 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:05:01 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:05:01 PM	Tube furnace set to 0
11/9/2011	7:05:04 PM	Helium valve closed
11/9/2011	7:05:04 PM	BCl3 valve closed
11/9/2011	7:05:04 PM	PH3 valve closed
11/9/2011	7:05:04 PM	SiCl4 pre valve closed
11/9/2011	7:05:04 PM	SiCl4 post valve closed
11/9/2011	7:05:04 PM	Main Vac valve closed
11/9/2011	7:05:04 PM	Bypass valve closed
11/9/2011	7:05:04 PM	Bubbler valve closed
11/9/2011	7:05:04 PM	H2 valve opened
11/9/2011	7:05:04 PM	Helium MFC set to  0.000000
11/9/2011	7:05:04 PM	H2 MFC set to  500.000000
11/9/2011	7:05:04 PM	BCl3 MFC set to  0.000000
11/9/2011	7:05:04 PM	PHl3 MFC set to  0.000000
11/9/2011	7:05:04 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:05:04 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:05:04 PM	Tube furnace set to 100
11/9/2011	7:05:17 PM	Run aborted at 7:05 PM
11/9/2011	7:05:17 PM	Helium valve closed
11/9/2011	7:05:18 PM	H2 valve closed
11/9/2011	7:05:18 PM	BCl3 valve closed
11/9/2011	7:05:18 PM	PH3 valve closed
11/9/2011	7:05:18 PM	SiCl4 pre valve closed
11/9/2011	7:05:18 PM	SiCl4 post valve closed
11/9/2011	7:05:18 PM	Bypass valve closed
11/9/2011	7:05:18 PM	Main Vac valve closed
11/9/2011	7:05:18 PM	Bubbler valve closed
11/9/2011	7:05:18 PM	Helium MFC set to  0.000000
11/9/2011	7:05:18 PM	H2 MFC set to  0.000000
11/9/2011	7:05:18 PM	BCl3 MFC set to  0.000000
11/9/2011	7:05:18 PM	PHl3 MFC set to  0.000000
11/9/2011	7:05:18 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:05:18 PM	Tube furnace set to 0
11/9/2011	7:05:36 PM	Recipe started at 7:05 PM
11/9/2011	7:05:36 PM	Helium valve closed
11/9/2011	7:05:36 PM	H2 valve closed
11/9/2011	7:05:36 PM	BCl3 valve closed
11/9/2011	7:05:36 PM	PH3 valve closed
11/9/2011	7:05:36 PM	SiCl4 pre valve closed
11/9/2011	7:05:36 PM	SiCl4 post valve closed
11/9/2011	7:05:36 PM	Main Vac valve closed
11/9/2011	7:05:36 PM	Bypass valve closed
11/9/2011	7:05:36 PM	Bubbler valve closed
11/9/2011	7:05:36 PM	Helium MFC set to  0.000000
11/9/2011	7:05:36 PM	H2 MFC set to  0.000000
11/9/2011	7:05:36 PM	BCl3 MFC set to  0.000000
11/9/2011	7:05:36 PM	PHl3 MFC set to  0.000000
11/9/2011	7:05:36 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:05:36 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:05:36 PM	Tube furnace set to 0
11/9/2011	7:05:39 PM	Helium valve closed
11/9/2011	7:05:39 PM	BCl3 valve closed
11/9/2011	7:05:39 PM	PH3 valve closed
11/9/2011	7:05:39 PM	SiCl4 pre valve closed
11/9/2011	7:05:39 PM	SiCl4 post valve closed
11/9/2011	7:05:39 PM	Main Vac valve closed
11/9/2011	7:05:39 PM	Bypass valve closed
11/9/2011	7:05:39 PM	Bubbler valve closed
11/9/2011	7:05:39 PM	H2 valve opened
11/9/2011	7:05:39 PM	Helium MFC set to  0.000000
11/9/2011	7:05:39 PM	H2 MFC set to  500.000000
11/9/2011	7:05:39 PM	BCl3 MFC set to  0.000000
11/9/2011	7:05:39 PM	PHl3 MFC set to  0.000000
11/9/2011	7:05:39 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:05:39 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:05:39 PM	Tube furnace set to 100
11/9/2011	7:05:55 PM	Helium valve closed
11/9/2011	7:05:55 PM	BCl3 valve closed
11/9/2011	7:05:55 PM	PH3 valve closed
11/9/2011	7:05:55 PM	SiCl4 pre valve closed
11/9/2011	7:05:55 PM	SiCl4 post valve closed
11/9/2011	7:05:55 PM	Main Vac valve closed
11/9/2011	7:05:55 PM	Bypass valve closed
11/9/2011	7:05:55 PM	H2 valve opened
11/9/2011	7:05:55 PM	Bubbler valve opened
11/9/2011	7:05:55 PM	Helium MFC set to  0.000000
11/9/2011	7:05:55 PM	H2 MFC set to  500.000000
11/9/2011	7:05:55 PM	BCl3 MFC set to  0.000000
11/9/2011	7:05:55 PM	PHl3 MFC set to  0.000000
11/9/2011	7:05:55 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:05:55 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:05:55 PM	Tube furnace set to 1000
11/9/2011	7:05:56 PM	Helium valve closed
11/9/2011	7:05:56 PM	BCl3 valve closed
11/9/2011	7:05:56 PM	PH3 valve closed
11/9/2011	7:05:56 PM	SiCl4 pre valve closed
11/9/2011	7:05:56 PM	SiCl4 post valve closed
11/9/2011	7:05:56 PM	Main Vac valve closed
11/9/2011	7:05:56 PM	Bypass valve closed
11/9/2011	7:05:56 PM	H2 valve opened
11/9/2011	7:05:56 PM	Bubbler valve opened
11/9/2011	7:05:56 PM	Helium MFC set to  0.000000
11/9/2011	7:05:56 PM	H2 MFC set to  500.000000
11/9/2011	7:05:56 PM	BCl3 MFC set to  0.000000
11/9/2011	7:05:56 PM	PHl3 MFC set to  0.000000
11/9/2011	7:05:56 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:05:56 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:05:57 PM	Tube furnace set to 1000
11/9/2011	7:27:57 PM	Helium valve closed
11/9/2011	7:27:57 PM	BCl3 valve closed
11/9/2011	7:27:57 PM	PH3 valve closed
11/9/2011	7:27:57 PM	Main Vac valve closed
11/9/2011	7:27:57 PM	Bypass valve closed
11/9/2011	7:27:57 PM	H2 valve opened
11/9/2011	7:27:57 PM	SiCl4 pre valve opened
11/9/2011	7:27:57 PM	SiCl4 post valve opened
11/9/2011	7:27:57 PM	Bubbler valve opened
11/9/2011	7:27:57 PM	Helium MFC set to  0.000000
11/9/2011	7:27:57 PM	H2 MFC set to  500.000000
11/9/2011	7:27:57 PM	BCl3 MFC set to  0.000000
11/9/2011	7:27:57 PM	PHl3 MFC set to  0.000000
11/9/2011	7:27:57 PM	SiCl4 MFC set to  36.000000
11/9/2011	7:27:57 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:27:57 PM	Tube furnace set to 1000
11/9/2011	7:47:57 PM	Helium valve closed
11/9/2011	7:47:57 PM	BCl3 valve closed
11/9/2011	7:47:57 PM	PH3 valve closed
11/9/2011	7:47:57 PM	SiCl4 pre valve closed
11/9/2011	7:47:57 PM	SiCl4 post valve closed
11/9/2011	7:47:57 PM	Main Vac valve closed
11/9/2011	7:47:57 PM	Bypass valve closed
11/9/2011	7:47:57 PM	H2 valve opened
11/9/2011	7:47:57 PM	Bubbler valve opened
11/9/2011	7:47:57 PM	Helium MFC set to  0.000000
11/9/2011	7:47:57 PM	H2 MFC set to  500.000000
11/9/2011	7:47:57 PM	BCl3 MFC set to  0.000000
11/9/2011	7:47:57 PM	PHl3 MFC set to  0.000000
11/9/2011	7:47:57 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:47:57 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:47:57 PM	Tube furnace set to 950
11/9/2011	7:52:57 PM	Helium valve closed
11/9/2011	7:52:57 PM	BCl3 valve closed
11/9/2011	7:52:57 PM	PH3 valve closed
11/9/2011	7:52:57 PM	SiCl4 pre valve closed
11/9/2011	7:52:57 PM	SiCl4 post valve closed
11/9/2011	7:52:57 PM	Main Vac valve closed
11/9/2011	7:52:57 PM	Bypass valve closed
11/9/2011	7:52:57 PM	H2 valve opened
11/9/2011	7:52:57 PM	Bubbler valve opened
11/9/2011	7:52:57 PM	Helium MFC set to  0.000000
11/9/2011	7:52:57 PM	H2 MFC set to  500.000000
11/9/2011	7:52:57 PM	BCl3 MFC set to  0.000000
11/9/2011	7:52:57 PM	PHl3 MFC set to  0.000000
11/9/2011	7:52:57 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:52:57 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:52:57 PM	Tube furnace set to 750
11/9/2011	7:57:57 PM	Helium valve closed
11/9/2011	7:57:57 PM	BCl3 valve closed
11/9/2011	7:57:57 PM	PH3 valve closed
11/9/2011	7:57:57 PM	SiCl4 pre valve closed
11/9/2011	7:57:57 PM	SiCl4 post valve closed
11/9/2011	7:57:57 PM	Main Vac valve closed
11/9/2011	7:57:57 PM	Bypass valve closed
11/9/2011	7:57:57 PM	H2 valve opened
11/9/2011	7:57:57 PM	Bubbler valve opened
11/9/2011	7:57:57 PM	Helium MFC set to  0.000000
11/9/2011	7:57:57 PM	H2 MFC set to  500.000000
11/9/2011	7:57:57 PM	BCl3 MFC set to  0.000000
11/9/2011	7:57:57 PM	PHl3 MFC set to  0.000000
11/9/2011	7:57:57 PM	SiCl4 MFC set to  0.000000
11/9/2011	7:57:57 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	7:57:57 PM	Tube furnace set to 750
11/9/2011	8:02:57 PM	H2 valve closed
11/9/2011	8:02:57 PM	BCl3 valve closed
11/9/2011	8:02:57 PM	PH3 valve closed
11/9/2011	8:02:57 PM	SiCl4 pre valve closed
11/9/2011	8:02:57 PM	SiCl4 post valve closed
11/9/2011	8:02:57 PM	Main Vac valve closed
11/9/2011	8:02:57 PM	Bypass valve closed
11/9/2011	8:02:57 PM	Helium valve opened
11/9/2011	8:02:57 PM	Bubbler valve opened
11/9/2011	8:02:57 PM	Helium MFC set to  400.000000
11/9/2011	8:02:57 PM	H2 MFC set to  0.000000
11/9/2011	8:02:57 PM	BCl3 MFC set to  0.000000
11/9/2011	8:02:57 PM	PHl3 MFC set to  0.000000
11/9/2011	8:02:57 PM	SiCl4 MFC set to  0.000000
11/9/2011	8:02:57 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	8:02:57 PM	Tube furnace set to 0
11/9/2011	8:32:57 PM	Helium valve closed
11/9/2011	8:32:57 PM	H2 valve closed
11/9/2011	8:32:57 PM	BCl3 valve closed
11/9/2011	8:32:57 PM	PH3 valve closed
11/9/2011	8:32:57 PM	SiCl4 pre valve closed
11/9/2011	8:32:57 PM	SiCl4 post valve closed
11/9/2011	8:32:57 PM	Main Vac valve closed
11/9/2011	8:32:57 PM	Bypass valve closed
11/9/2011	8:32:57 PM	Bubbler valve closed
11/9/2011	8:32:57 PM	Helium MFC set to  0.000000
11/9/2011	8:32:57 PM	H2 MFC set to  0.000000
11/9/2011	8:32:57 PM	BCl3 MFC set to  0.000000
11/9/2011	8:32:57 PM	PHl3 MFC set to  0.000000
11/9/2011	8:32:57 PM	SiCl4 MFC set to  0.000000
11/9/2011	8:32:57 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	8:32:58 PM	Tube furnace set to 0
11/9/2011	8:37:58 PM	Helium valve closed
11/9/2011	8:37:58 PM	H2 valve closed
11/9/2011	8:37:58 PM	BCl3 valve closed
11/9/2011	8:37:58 PM	PH3 valve closed
11/9/2011	8:37:58 PM	SiCl4 pre valve closed
11/9/2011	8:37:58 PM	SiCl4 post valve closed
11/9/2011	8:37:58 PM	Main Vac valve closed
11/9/2011	8:37:58 PM	Bubbler valve closed
11/9/2011	8:37:58 PM	Bypass valve opened
11/9/2011	8:37:58 PM	Helium MFC set to  0.000000
11/9/2011	8:37:58 PM	H2 MFC set to  0.000000
11/9/2011	8:37:58 PM	BCl3 MFC set to  0.000000
11/9/2011	8:37:58 PM	PHl3 MFC set to  0.000000
11/9/2011	8:37:58 PM	SiCl4 MFC set to  0.000000
11/9/2011	8:37:58 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	8:37:58 PM	Tube furnace set to 0
11/9/2011	8:38:50 PM	Helium valve closed
11/9/2011	8:38:50 PM	H2 valve closed
11/9/2011	8:38:50 PM	BCl3 valve closed
11/9/2011	8:38:50 PM	PH3 valve closed
11/9/2011	8:38:50 PM	SiCl4 pre valve closed
11/9/2011	8:38:51 PM	SiCl4 post valve closed
11/9/2011	8:38:51 PM	Main Vac valve closed
11/9/2011	8:38:51 PM	Bubbler valve closed
11/9/2011	8:38:51 PM	Bypass valve opened
11/9/2011	8:38:51 PM	Helium MFC set to  0.000000
11/9/2011	8:38:51 PM	H2 MFC set to  0.000000
11/9/2011	8:38:51 PM	BCl3 MFC set to  0.000000
11/9/2011	8:38:51 PM	PHl3 MFC set to  0.000000
11/9/2011	8:38:51 PM	SiCl4 MFC set to  0.000000
11/9/2011	8:38:51 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	8:38:51 PM	Tube furnace set to 0
11/9/2011	8:41:51 PM	Helium valve closed
11/9/2011	8:41:51 PM	H2 valve closed
11/9/2011	8:41:51 PM	BCl3 valve closed
11/9/2011	8:41:51 PM	PH3 valve closed
11/9/2011	8:41:51 PM	SiCl4 pre valve closed
11/9/2011	8:41:51 PM	SiCl4 post valve closed
11/9/2011	8:41:51 PM	Bypass valve closed
11/9/2011	8:41:51 PM	Bubbler valve closed
11/9/2011	8:41:51 PM	Main Vac valve opened
11/9/2011	8:41:51 PM	Helium MFC set to  0.000000
11/9/2011	8:41:51 PM	H2 MFC set to  0.000000
11/9/2011	8:41:51 PM	BCl3 MFC set to  0.000000
11/9/2011	8:41:51 PM	PHl3 MFC set to  0.000000
11/9/2011	8:41:51 PM	SiCl4 MFC set to  0.000000
11/9/2011	8:41:51 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	8:41:51 PM	Tube furnace set to 0
11/9/2011	8:41:52 PM	Run finished at 8:41 PM
11/9/2011	8:42:51 PM	Main Vac valve closed
11/9/2011	8:45:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/9/2011	8:45:15 PM	Recipe started at 8:45 PM
11/9/2011	8:45:15 PM	Helium valve closed
11/9/2011	8:45:15 PM	H2 valve closed
11/9/2011	8:45:15 PM	BCl3 valve closed
11/9/2011	8:45:15 PM	PH3 valve closed
11/9/2011	8:45:15 PM	SiCl4 pre valve closed
11/9/2011	8:45:15 PM	SiCl4 post valve closed
11/9/2011	8:45:15 PM	Main Vac valve closed
11/9/2011	8:45:15 PM	Bubbler valve closed
11/9/2011	8:45:15 PM	Bypass valve opened
11/9/2011	8:45:15 PM	Helium MFC set to  0.000000
11/9/2011	8:45:15 PM	H2 MFC set to  0.000000
11/9/2011	8:45:15 PM	BCl3 MFC set to  0.000000
11/9/2011	8:45:15 PM	PHl3 MFC set to  0.000000
11/9/2011	8:45:15 PM	SiCl4 MFC set to  0.000000
11/9/2011	8:45:15 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	8:45:15 PM	Tube furnace set to 0
11/9/2011	8:47:05 PM	Helium valve closed
11/9/2011	8:47:05 PM	H2 valve closed
11/9/2011	8:47:05 PM	BCl3 valve closed
11/9/2011	8:47:05 PM	PH3 valve closed
11/9/2011	8:47:05 PM	SiCl4 pre valve closed
11/9/2011	8:47:05 PM	SiCl4 post valve closed
11/9/2011	8:47:05 PM	Main Vac valve closed
11/9/2011	8:47:05 PM	Bubbler valve closed
11/9/2011	8:47:05 PM	Bypass valve opened
11/9/2011	8:47:05 PM	Helium MFC set to  0.000000
11/9/2011	8:47:05 PM	H2 MFC set to  0.000000
11/9/2011	8:47:05 PM	BCl3 MFC set to  0.000000
11/9/2011	8:47:05 PM	PHl3 MFC set to  0.000000
11/9/2011	8:47:05 PM	SiCl4 MFC set to  0.000000
11/9/2011	8:47:05 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	8:47:05 PM	Tube furnace set to 0
11/9/2011	8:48:05 PM	Helium valve closed
11/9/2011	8:48:05 PM	H2 valve closed
11/9/2011	8:48:05 PM	BCl3 valve closed
11/9/2011	8:48:05 PM	PH3 valve closed
11/9/2011	8:48:05 PM	SiCl4 pre valve closed
11/9/2011	8:48:05 PM	SiCl4 post valve closed
11/9/2011	8:48:05 PM	Bypass valve closed
11/9/2011	8:48:05 PM	Bubbler valve closed
11/9/2011	8:48:05 PM	Main Vac valve opened
11/9/2011	8:48:05 PM	Helium MFC set to  0.000000
11/9/2011	8:48:05 PM	H2 MFC set to  0.000000
11/9/2011	8:48:05 PM	BCl3 MFC set to  0.000000
11/9/2011	8:48:05 PM	PHl3 MFC set to  0.000000
11/9/2011	8:48:05 PM	SiCl4 MFC set to  0.000000
11/9/2011	8:48:05 PM	Bypass solenoid MFC set to  0.000000
11/9/2011	8:48:06 PM	Tube furnace set to 0
11/9/2011	8:48:07 PM	Run finished at 8:48 PM
11/9/2011	8:48:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
